Prediction model and experimental investigation of mid-spatial-frequency error in bonnet polishing of off-axis aspheric X-ray mirror
Release Time:2025-11-03 Hits:
Indexed by: Journal Papers
Document Code: 588685
Date of Publication: 2025-10-20
Journal: OPTICS EXPRESS
Volume: 33
Issue: 21
Page Number: 44792-44810
ISSN: 1094-4087
Key Words: GENERATION; MATERIAL REMOVAL CHARACTERISTICS; OPTICS; SIMULATION; TOOL INFLUENCE FUNCTION