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一种消除重力影响的薄基片变形测量方法

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First Author:Dong Zhigang

Disigner of the Invention:Renke Kang,刘海军,Shang GAO,zhuxianglong,Zhou Ping,陈修艺

Affilication of Author(s):机械工程学院

Application Number:CN105066897A

Authorization number:CN201510496479.7

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