Current position: Home >> Scientific Research >> Patents

一种环抛机盘面修整系统及其工作方法

Hits:

First Author:zhuxianglong

Disigner of the Invention:Renke Kang,Dong Zhigang,马进,Shang GAO,Harry,HANG GAO

Affilication of Author(s):机械工程学院

Application Number:CN109227388A

Authorization number:CN201811096546.6

Pre One:一种基片均匀抛光装置及其工作方法

Next One:一种内冷却固结磨料研磨盘