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一种基于光场耦合的超薄激光晶体化学机械抛光液及其制备、抛光方法

Release Time:2026-03-13  Hits:

First Author: Shang GAO

Disigner of the Invention: Renke Kang,张笑宇,Dong Zhigang,郭星晨

Institution: 机械工程学院

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