Current position: Home >> Scientific Research >> Patents

一种低应力夹持装置

Release Time:2026-03-13  Hits:

First Author: Renke Kang

Disigner of the Invention: zhuxianglong,Dong Zhigang,李建波,Shang GAO,张小民

Institution: 机械工程学院

Application Date: 2019-11-06

Application Number: 201911076985.5

Authorization Date: 2020-08-14

Authorization Number: ZL 201911076985.5

Prev One:一种大型抛光机盘面平面度检测装置及其工作方法

Next One:一种半导体晶片光电化学机械抛光加工装置及加工方法