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个人信息Personal Information
教授
博士生导师
硕士生导师
性别：男
毕业院校：大连理工大学
学位：博士
所在单位：机械工程学院
学科：机械制造及其自动化
办公地点：机械工程学院高性能制造研究所#5015室
联系方式：手机：15104088992
电子邮箱：gaoshang@dlut.edu.cn
扫描关注
Surface characteristics and material removal mechanisms during nanogrinding on C-face and Si-face of 4H-SiC crystals: Experimental and molecular dynamics insights
点击次数：
发表时间：2024-06-01
发表刊物：Applied Surface Science
卷号：665
ISSN号：0169-4332
关键字：4h-SiC; C-face; Cost effective; Cost effectiveness; Ductile fracture; Fracture toughness; Grinding (machining); Material removal mechanisms; Molecular dynamics; Morphology; Nano-grinding; Power devices; Radio frequency devices; Si faces; Silicon wafers; Single crystals; Surface characteristics; Surface materials; Surface morphology; Surface roughness