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论文类型： 期刊论文

发表时间： 2014-11-01

发表刊物： CHINESE PHYSICS B

收录刊物： SCIE、EI、ISTIC、Scopus

卷号： 23

期号： 11

ISSN号： 1674-1056

关键字： inductively coupled plasmas; radio-frequency bias; Langmuir probe; fluid model

摘要： The inflexion point of electron density and effective electron temperature curves versus radio-frequency (RF) bias voltage is observed in the H mode of inductively coupled plasmas (ICPs). The electron energy probability function (EEPF) evolves first from a Maxwellian to a Druyvesteyn-like distribution, and then to a Maxwellian distribution again as the RF bias voltage increases. This can be explained by the interaction of two distinct bias-induced mechanisms, that is: bias-induced electron heating and bias-induced ion acceleration loss and the decrease of the effective discharge volume due to the sheath expansion. Furthermore, the trend of electron density is verified by a fluid model combined with a sheath module.