面向刻蚀工艺的脉冲调制射频感应耦合等离子体源的特性研究
Release Time:2016-10-10 Hits:
Leading Scientist: Fei Gao
Project Participants: 张钰如,Wenqi Lu
Project Source: 国家自然科学基金项目
Sub-Class of Project: 面上项目
Status: 结题
Supported by: National Natural Science Foundation of China
Nature of Project: 纵向
Project Approval Number: 11675039
Date of Project Approval: 2016-08-17
Scheduled Completion Time: 2020-12-31
Date of Project Initiation: 2017-01-01