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反应离子刻蚀大口径元件适用性研究

Release Time:2018-10-20  Hits:

Leading Scientist: Fei Gao

Project Source: 企事业单位委托科技项目

Status: 结题

Supported by: China Academy of Engineering Physics Laser Fusion Research Center

Nature of Project: 横向

Date of Project Approval: 2018-10-17

Scheduled Completion Time: 2018-12-31

Date of Project Initiation: 2018-10-17

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