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弱磁场低频驱动高功率低气压感应耦合等离子体源放电机理研究

Release Time:2019-03-21  Hits:

Leading Scientist: 徐翔

Project Participants: Fei Gao

Project Source: 国家自然科学基金项目

Sub-Class of Project: 面上项目

Status: 完成

Supported by: National Natural Science Foundation of China

Nature of Project: 纵向

Project Approval Number: 11275039

Date of Project Approval: 2012-09-25

Scheduled Completion Time: 2016-12-31

Date of Project Initiation: 2013-01-01

Date of Project Completion: 2016-12-31

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