location： Current position: Home >> Scientific Research >> Paper Publications

Experimental investigation of the electron impact excitation behavior in pulse-modulated radio frequency Ar/O2 inductively coupled plasma

Hits:

Indexed by:期刊论文

Date of Publication:2018-01-01

Journal:J. Appl. Phys.

Volume:125

Page Number:23303-23303

Pre One:Automatic emissive probe apparatus for accurate plasma and vacuum space potential measurements

Next One:高功率微波输出窗内侧击穿动力学的PIC/MCC 模拟研究
Recommended Ph.D.Supervisor Recommended MA Supervisor Institutional Repository Personal Page

Address: No.2 Linggong Road, Ganjingzi District, Dalian City, Liaoning Province, P.R.C., 116024

Click : times
  • MOBILE Version
    •
    Open time:..
    The Last Update Time:..

    Mobile phone sweep