Release Time:2019-03-09  Hits:

Indexed by: Journal Article

Date of Publication: 2013-11-01

Journal: CHINESE PHYSICS B

Included Journals: Scopus、ISTIC、EI、SCIE

Volume: 22

Issue: 11

ISSN: 1674-1056

Key Words: mode transition; inductively coupled plasma; hairpin probe; hydrogen

Abstract: Changes of the electron dynamics in hydrogen (H-2) radio-frequency (RF) inductively coupled plasmas are investigated using a hairpin probe and an intensified charged coupled device (ICCD). The electron density, plasma emission intensity, and input current (voltage) are measured during the E to H mode transitions at different pressures. It is found that the electron density, plasma emission intensity, and input current jump up discontinuously, and the input voltage jumps down at the E to H mode transition points. And the threshold power of the E to H mode transition decreases with the increase of the pressure. Moreover, space and phase resolved optical emission spectroscopic measurements reveal that, in the E mode, the RF dynamics is characterized by one dominant excitation per RF cycle, while in the H mode, there are two excitation maxima within one cycle.