Current position: Home >> Scientific Research >> Patents

一种适用于低气压甚高频放电中交变磁场强度测量的探针

Hits:

First Author:刘佳

Disigner of the Invention:Fei Gao,wangyounian

Application Number:CN201510263218.0

Authorization Date:2015-05-22

Authorization number:CN104849678A

Pre One:提高等离子体径向均匀性的等离子体腔室

Next One:一种细长管射频感应耦合等离子体源反应器
Recommended Ph.D.Supervisor Recommended MA Supervisor Institutional Repository Personal Page

Address: No.2 Linggong Road, Ganjingzi District, Dalian City, Liaoning Province, P.R.C., 116024

Click : times
  • MOBILE Version
    •
    Open time:..
    The Last Update Time:..

    Mobile phone sweep