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一种产生负氢离子机制的等离子体腔室

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First Author:Fei Gao

Disigner of the Invention:wangyounian

Application Number:CN201420699099.4

Authorization Date:2014-11-20

Authorization number:CN204231739U

Pre One:一种射频等离子体反应室
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Address: No.2 Linggong Road, Ganjingzi District, Dalian City, Liaoning Province, P.R.C., 116024

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