Current position: Home >> Scientific Research >> Patents

一种产生负氢离子机制的等离子体腔室

Release Time:2019-03-09  Hits:

First Author: Fei Gao

Disigner of the Invention: 王友年

Application Number: CN201420699099.4

Authorization Date: 2014-11-20

Authorization Number: CN204231739U

Prev One:一种射频等离子体反应室