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论文类型：期刊论文

发表时间：2012-01-01

发表刊物：CHINESE PHYSICS LETTERS

收录刊物：SCIE、ISTIC、Scopus

卷号：29

期号：1

ISSN号：0256-307X

摘要：GaN thin films are grown on Si-terminated (0001) 6H-SiC substrates pre-treated with SiH4 in a metal organic chemical vapor deposition system. The influence of the SiH4 pre-treatment conditions on the SiC surface is carefully investigated. It is found that SiH4 could react with the SiC surface oxide, which will change the surface termination. Moreover, our experiments demonstrate that SiH4 pre-treatment can distinctly influence the AlGaN nucleation layer and the basic characteristics of GaN.