个人信息Personal Information
教授
博士生导师
硕士生导师
性别:男
毕业院校:德国卡尔斯鲁厄工业大学
学位:博士
所在单位:材料科学与工程学院
学科:材料物理与化学. 微电子学与固体电子学
办公地点:辽宁省大连市高新园区凌工路2号
大连理工大学新三束实验室412
电子邮箱:zhoudayu@dlut.edu.cn
Insights into electrical characteristics of silicon doped hafnium oxide ferroelectric thin films
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论文类型:期刊论文
发表时间:2012-02-20
发表刊物:APPLIED PHYSICS LETTERS
收录刊物:SCIE、EI、Scopus
卷号:100
期号:8
ISSN号:0003-6951
摘要:Silicon doped hafnium oxide thin films were recently discovered to exhibit ferroelectricity. In the present study, metal-ferroelectric-metal capacitors with Si:HfO2 thin films as ferroelectric material and TiN as electrodes have been characterized with respect to capacitance and current density as functions of temperature and applied voltage. Polarity asymmetry of the frequency dependent coercive field was explained by interfacial effects. No ferroelectric-paraelectric phase transition was observed at temperatures up to 478 K. Clear distinctions between current evolutions with or without polarization switching were correlated to the time competition between the measurement and the response of relaxation mechanisms. (C) 2012 American Institute of Physics. [http://dx.doi.org/10.1063/1.3688915]