个人信息Personal Information
教授
博士生导师
硕士生导师
性别:男
毕业院校:威尔大学
学位:博士
所在单位:机械工程学院
学科:微机电工程
办公地点:机械工程学院2号楼214-2
联系方式:办公电话:0411-84709754
电子邮箱:zouhl@dlut.edu.cn
Preparation and characterization of PZT thin films deposited on PZT buffer layer with different lead content
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论文类型:期刊论文
发表时间:2017-09-02
发表刊物:INTEGRATED FERROELECTRICS
收录刊物:SCIE、EI、Scopus
卷号:183
期号:1
页面范围:182-192
ISSN号:1058-4587
关键字:PZT thin films; buffer layer; lead content; (100) preferential orientation; sol-gel methods
摘要:Lead zirconate titanate (PZT) thin films deposited on Pt electrode and Pb1+x(Zr-0.52,Ti-0.48)O-3 (x = 0.10, 0.15, 0.25, 0.30) buffer layer have been prepared by sol-gel methods to investigate the effects of lead content in the buffer layer on crystalline orientation, electric and fatigue properties of PZT films. XRD and SEM showed that all films exhibited dense perovskite structure with (100) preferential orientation. Themaximum dielectric constant (1571 at 100 Hz) was obtained in the PZT film with buffer layer containing 25% excess lead, which increased by 42.5% compared with the film without buffer layer. Fatigue resistance was improved by introducing buffer layer.