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Hydrogen plasma induced crystallization of Si thin films by remote inductively coupled plasma source assistant pulsed dc twin magnetron sputtering

Release Time:2023-02-09  Hits:

Date of Publication: 2022-10-03

Journal: SURFACE COATINGS TECHNOLOGY

Volume: 206

Issue: 14

Page Number: 3159-3164

ISSN: 0257-8972

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