Influence of N-2 flow rate on the mechanical properties of SiNx films deposited by microwave electron cyclotron resonance magnetron sputtering
Release Time:2023-02-09 Hits:
Date of Publication: 2022-10-03
Journal: THIN SOLID FILMS
Volume: 518
Issue: 8
Page Number: 2077-2081
ISSN: 0040-6090