Release Time:2023-02-09 Hits:
Date of Publication: 2022-10-03
Journal: Plasma Science and Technology
Volume: 18
Issue: 1
Page Number: 58-61
ISSN: 1009-0630
Prev One:Improved inflection point method of emissive probe for accurate measurement of plasma potential
Next One:Influence of N-2 flow rate on the mechanical properties of SiNx films deposited by microwave electron cyclotron resonance magnetron sputtering