Hits:
Date of Publication:2022-10-03
Journal:Plasma Science and Technology
Volume:18
Issue:1
Page Number:58-61
ISSN No.:1009-0630
Pre One:Improved inflection point method of emissive probe for accurate measurement of plasma potential
Next One:Influence of N-2 flow rate on the mechanical properties of SiNx films deposited by microwave electron cyclotron resonance magnetron sputtering