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PZT压电薄膜无阀微泵的研究

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Indexed by:期刊论文

Date of Publication:2008-01-01

Journal:功能材料与器件学报

Included Journals:PKU、ISTIC

Volume:14

Issue:4

Page Number:793-798

Pre One:后烘温度对SU-8光刻胶热溶胀性及内应力的影响

Next One:模糊神经网络在SU-8胶内应力研究中的应用
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