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Numerical simulation of particle densities distributions in atmospheric pressure Ar/SiH4/H2 mixed plasma under very high frequency excitation

Release Time:2022-10-07  Hits:

Date of Publication: 2022-10-07

Journal: 高电压技术

Institution: 物理学院

Volume: 39

Issue: 9

Page Number: 2228-2234

ISSN: 1003-6520

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