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Numerical Simulation of VHF Effects on Densities of Important Species for Silicon Film Deposition at Atmospheric Pressure

Release Time:2022-10-07  Hits:

Date of Publication: 2022-10-07

Journal: Plasma Science and Technology

Institution: 物理学院

Volume: 14

Issue: 12

Page Number: 1106-1109

ISSN: 1009-0630

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