VMaJ5iiQWHc1b5dk9VeeeGIx4Kviez1ZSlGrUDovoUWWOxNUEQP7jYtynuFk
Current position: Home >> Scientific Research >> Research Projects

晶体薄片超精密抛光

Release Time:2023-09-26  Hits:

Leading Scientist: 高尚

Project Participants: 郭明龙,金洙吉

Project Source: 国家科技部

Status: 在研

Supported by: Chinese Academy of Sciences Xi'an Institute of Optics and Precision Mechanics

Nature of Project: 纵向

Project Approval Number: 2022YFB3605902

Date of Project Approval: 2022-11-01

Scheduled Completion Time: 2025-10-31

Date of Project Initiation: 2022-11-01

Prev One:全硅键合片高精度减薄抛光技术研究

Next One:主反左、右展开瓣蜂窝加工合同