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全硅键合片高精度减薄抛光技术研究

Release Time:2023-11-03  Hits:

Leading Scientist: 郭晓光

Project Participants: zhuxianglong,Shang GAO

Project Source: 企事业单位委托科技项目

Status: 在研

Supported by: Beijing Aerospace Control Instrument Research Institute

Nature of Project: 横向

Date of Project Approval: 2019-12-20

Scheduled Completion Time: 2021-12-31

Date of Project Initiation: 2019-12-20

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