Release Time:2019-10-12  Hits:

Indexed by: Journal Article

Date of Publication: 2017-03-01

Journal: FRONTIERS OF MECHANICAL ENGINEERING

Included Journals: SCIE

Volume: 12

Issue: 1,SI

Page Number: 18-32

ISSN: 2095-0233

Key Words: micro machining; cutting; electro discharge machining (EDM); laser machining; focused ion beam (FIB)

Abstract: Device miniaturization is an emerging advanced technology in the 21st century. The miniaturization of devices in different fields requires production of micro- and nano-scale components. The features of these components range from the sub-micron to a few hundred microns with high tolerance to many engineering materials. These fields mainly include optics, electronics, medicine, bio-technology, communications, and avionics. This paper reviewed the recent advances in micro- and nano-machining technologies, including micro-cutting, micro-electrical-discharge machining, laser micro-machining, and focused ion beam machining. The four machining technologies were also compared in terms of machining efficiency, workpiece materials being machined, minimum feature size, maximum aspect ratio, and surface finish.