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单晶硅反射镜的超精密磨削工艺

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Date of Publication:2019-01-01

Journal:光学精密工程

Volume:27

Issue:5

Page Number:1087-1095

ISSN No.:1004-924X

Note:新增回溯数据

Pre One:新一代半导体材料氧化镓单晶的制备方法及其超精密加工技术研究进展

Next One:固结金刚石研磨盘加工蓝宝石基片的磨削性能研究
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