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新一代半导体材料氧化镓单晶的制备方法及其超精密加工技术研究进展

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Indexed by:期刊论文

Date of Publication:2022-07-01

Journal:Jixie Gongcheng Xuebao/Journal of Mechanical Engineering

Affiliation of Author(s):机械工程学院

Volume:57

Issue:9

Page Number:213-232

ISSN No.:0577-6686

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