新一代半导体材料氧化镓单晶的制备方法及其超精密加工技术研究进展
Release Time:2022-07-01 Hits:
Indexed by: Journal Article
Date of Publication: 2022-07-01
Journal: Jixie Gongcheng Xuebao/Journal of Mechanical Engineering
Institution: 机械工程学院
Volume: 57
Issue: 9
Page Number: 213-232
ISSN: 0577-6686