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Effect of Strain Rate on the Deformation Characteristic of AlN Ceramics under Scratching

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Date of Publication:2022-10-02

Journal:MICROMACHINES

Affiliation of Author(s):机械工程学院

Volume:12

Issue:1

Key Words:"aluminum nitride ceramics; nanoscratching; strain rate effect; stress field model; deformation characteristic"

Pre One:Effects of taping on grinding quality of silicon wafers in backgrinding

Next One:Warping of silicon wafers subjected to back-thinning process
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