Release Time:2024-04-24  Hits:

Indexed by: Journal Papers

Document Code: 387462

Date of Publication: 2024-01-01

Journal: 表面技术

Volume: 53

Issue: 3

Page Number: 22-27,46

ISSN: 1001-3660

Key Words: 去除均匀性; 硅片; 磨削; 磨抛轮; 磨粒切削深度; 面形仿真

CN: 50-1083/TG