location: Current position: Home >> Scientific Research >> Paper Publications

超精密磨削 YAG 晶体的脆塑转变临界深度预测

Hits:

Date of Publication:2024-04-26

Journal:Optics and Precision Engineering

Issue:1

Page Number:84-94

ISSN No.:1004-924X

Pre One:Environment-friendly chemical mechanical polishing using NaHCO3-activated H2O2 slurry for highly efficient finishing of 4H-SiC (0001) surface

Next One:弹性磨抛轮加工硅片面形预测模型及试验验证