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Atomic understanding of elastic-plastic deformation and crack evolution for single crystal AlN during nanoscratch

Release Time:2024-05-29  Hits:

Indexed by: Journal Papers

Document Code: 373280

Date of Publication: 2023-11-15

Journal: CERAMICS INTERNATIONAL

Volume: 49

Issue: 22

Page Number: 35357-35367

ISSN: 0272-8842

Key Words: BEHAVIOR; DEFECTS; DISLOCATIONS; MOLECULAR-DYNAMICS SIMULATION; SILICON-WAFERS; TO-DUCTILE TRANSITION

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