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Insight into Polishing Slurry and Material Removal Mechanism of Photoassisted Chemical Mechanical Polishing of YAG Crystals.

Release Time:2024-05-30  Hits:

Journal: Langmuir : the ACS journal of surfaces and colloids

Volume: 39

Issue: 38

Page Number: 13668-13677

ISSN: 0743-7463

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