Insight into Polishing Slurry and Material Removal Mechanism of Photoassisted Chemical Mechanical Polishing of YAG Crystals
Release Time:2024-05-30 Hits:
Indexed by: Journal Papers
Document Code: 382767
Date of Publication: 2023-09-12
Journal: LANGMUIR
Volume: 39
Issue: 38
Page Number: 13668-13677
ISSN: 0743-7463
Key Words: ACTIVATION; IRON; LASER; OXIDATION; PEROXYMONOSULFATE; RAY PHOTOELECTRON-SPECTROSCOPY; SULFATE
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