Surface characteristics and material removal mechanisms during nanogrinding on C-face and Si-face of 4H-SiC crystals: Experimental and molecular dynamics insights
Release Time:2024-06-02 Hits:
Indexed by: Journal Papers
Document Code: 393408
Date of Publication: 2024-08-30
Journal: APPLIED SURFACE SCIENCE
Volume: 665
ISSN: 0169-4332
Key Words: DEFORMATION; EVOLUTION; PROCESSING OUTCOMES; SIMULATION