Release Time:2024-06-05  Hits:

Indexed by: Journal Papers

Document Code: 394124

Date of Publication: 2024-07-01

Journal: JOURNAL OF MANUFACTURING SCIENCE AND ENGINEERING-TRANSACTIONS OF THE ASME

Volume: 146

Issue: 7

ISSN: 1087-1357

Key Words: BEHAVIOR; CERAMICS; DEFORMATION MECHANISM; DEPTH; ELASTIC-MODULUS; HARDNESS; INDENTATION SIZE; PREDICTION MODEL; WAFERS; WHEEL