Mechanical effect of abrasives on silicon surface in chemo-mechanical grinding
Release Time:2024-06-06 Hits:
Indexed by: Journal Papers
Document Code: 370537
Date of Publication: 2023-11-01
Journal: INTERNATIONAL JOURNAL OF MECHANICAL SCIENCES
Volume: 257
ISSN: 0020-7403
Key Words: BRITTLE TRANSITION; CUTTING DEPTH; DAMAGE; DUCTILE; MATERIAL REMOVAL; MODEL; MONOCRYSTALLINE SILICON; PHASE-TRANSFORMATIONS; SINGLE-CRYSTAL SILICON; STRESS-FIELD