Atomic Understanding of the Plastic Deformation Mechanism of 4H-SiC Under Different Grain Depth-of-cut During Nano-Grinding
Release Time:2024-06-14 Hits:
Indexed by: Journal Papers
Document Code: 364411
Date of Publication: 2023-07-18
Journal: JOURNAL OF ELECTRONIC MATERIALS
Volume: 52
Issue: 7
Page Number: 4865-4877
ISSN: 0361-5235
Key Words: BEHAVIOR; BERKOVICH; CARBIDE; DIAMOND; PERFORMANCE; PHASE-TRANSFORMATION; SINGLE-CRYSTAL SILICON