大连理工大学主页平台管理系统 Shang GAO Atomic Understanding of the Plastic Deformation Mechanism of 4H-SiC Under Different Grain Depth-of-cut During Nano-Grinding Home

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Atomic Understanding of the Plastic Deformation Mechanism of 4H-SiC Under Different Grain Depth-of-cut During Nano-Grinding

Release Time:2024-06-14 Hits:

Date of Publication: 2024-06-14

Journal: Journal of Electronic Materials

Volume: 52

Issue: 7

Page Number: 4865-4877

ISSN: 0361-5235

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