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Effect of micromorphology on measurement of residual stress of ground silicon wafers using Raman spectroscopy

Release Time:2024-09-05  Hits:

Date of Publication: 2024-09-05

Journal: JOURNAL OF THE BRAZILIAN SOCIETY OF MECHANICAL SCIENCES AND ENGINEERING

Volume: 46

Issue: 8

ISSN: 1678-5878

Key Words: DAMAGE

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