Release Time:2024-11-21 Hits:
Date of Publication: 2024-11-21
Journal: CERAMICS INTERNATIONAL
Volume: 50
Issue: 21
Page Number: 43264-43278
ISSN: 0272-8842
Key Words: 1ST-PRINCIPLES; DIELECTRIC-PROPERTIES; ENERGY ION; INDUCED DAMAGE; MOLECULAR-DYNAMICS SIMULATIONS; OPTICAL-PROPERTIES; SILICON; SIO2; SIO2-FILMS