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Date of Publication:2024-11-21
Journal:CERAMICS INTERNATIONAL
Volume:50
Issue:21
Page Number:43264-43278
ISSN No.:0272-8842
Key Words:1ST-PRINCIPLES; DIELECTRIC-PROPERTIES; ENERGY ION; INDUCED DAMAGE; MOLECULAR-DYNAMICS SIMULATIONS; OPTICAL-PROPERTIES; SILICON; SIO2; SIO2-FILMS