Release Time:2024-09-30  Hits:

Date of Publication: 2024-09-30

Journal: Optics and Precision Engineering

Volume: 32

Issue: 13

Page Number: 2081-2090

ISSN: 1004-924X

Key Words: Abrasive cutting; Abrasive particles; Crystal cutting; Double sided; Fixed abrasive lapping; Fixed abrasives; Gear cutting; Lapping machines; LiTaO 3; Lithium tantalate; Material removal; Material removal planarization; Micromachining; Particle trajectories; Planarization; Single crystals; Tantalate minerals