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基于磨粒三维轨迹的钽酸锂双面研磨均匀性

Release Time:2024-09-30  Hits:

Indexed by: Journal Papers

Document Code: 397645

Date of Publication: 2024-01-01

Journal: 光学精密工程

Volume: 32

Issue: 13

Page Number: 2081-2090

ISSN: 1004-924X

CN: 22-1198/TH

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