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Subnanoscale Ion Beam Modification-Assisted Smoothing of Heterostructure Surfaces

Release Time:2024-09-06  Hits:

Date of Publication: 2024-09-06

Journal: ACS APPLIED MATERIALS & INTERFACES

Volume: 16

Issue: 29

Page Number: 38744-38756

ISSN: 1944-8244

Key Words: IRRADIATION; MICROSTRUCTURE; SILICON

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