Subnanoscale Ion Beam Modification-Assisted Smoothing of Heterostructure Surfaces
Release Time:2024-09-06 Hits:
Indexed by: Journal Papers
Document Code: 394881
Date of Publication: 2024-07-09
Journal: ACS APPLIED MATERIALS & INTERFACES
Volume: 16
Issue: 29
Page Number: 38744-38756
ISSN: 1944-8244
Key Words: IRRADIATION; MICROSTRUCTURE; SILICON