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Catalytic performance and efficient processing mechanism in photocatalysis-assisted chemical mechanical polishing of yttrium aluminum garnet with UV-MnFe2O4/PMS photocatalytic system

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Date of Publication:2025-10-24

Journal:COLLOIDS AND SURFACES A-PHYSICOCHEMICAL AND ENGINEERING ASPECTS

Volume:726

ISSN No.:0927-7757

Key Words:ESCA; OXIDATION; OXIDE; RAY PHOTOELECTRON-SPECTROSCOPY; SURFACES

Pre One:Study on four-point support inversion method for removing gravity-induced deformation of quasi-cylindrical low-stiffness shell

Next One:First-principles insights into the synergistic chemical-mechanical removal mechanism of 4H-SiC in chemical mechanical polishing
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