Catalytic performance and efficient processing mechanism in photocatalysis-assisted chemical mechanical polishing of yttrium aluminum garnet with UV-MnFe2O4/PMS photocatalytic system
Release Time:2025-10-26 Hits:
Date of Publication: 2025-10-24
Journal: COLLOIDS AND SURFACES A-PHYSICOCHEMICAL AND ENGINEERING ASPECTS
Volume: 726
ISSN: 0927-7757
Key Words: ESCA; OXIDATION; OXIDE; RAY PHOTOELECTRON-SPECTROSCOPY; SURFACES