电解液浓度对4H-SiC电化学机械抛光加工的影响研究
Release Time:2026-03-29 Hits:
Indexed by: Journal Papers
Document Code: 594145
Date of Publication: 2025-01-01
Journal: 制造技术与机床
Page Number: 1-13
ISSN: 1005-2402
Key Words: 4H-SiC; electrochemical mechanical polishing; electrochemical oxidation; electrolyte concentration; surface morphology
CN: 11-3398/TH