Release Time:2026-03-29 Hits:
Indexed by: Journal Papers
Document Code: 589918
Date of Publication: 2026-01-18
Journal: THIN-WALLED STRUCTURES
Volume: 218
ISSN: 0263-8231
Key Words: ACCURACY; ANISOTROPY; FLAT; FREE-VIBRATION; MIRRORS; OPTICS; QUALITY; SHAPE MEASUREMENT; SILICON-WAFER