Research on Electrolyte in Slurry for Photoelectrochemical Mechanical Polishing of GaN Wafers
Release Time:2026-03-29 Hits:
Indexed by: Journal Papers
Document Code: 591356
Date of Publication: 2025-12-25
Journal: Surface Science and Technology
Volume: 3
Issue: 1
ISSN: 2097-3624
Key Words: Aggregation; Electrolytes; GaN wafers; Photoelectrochemical mechanical polishing; Polishing slurry
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