Mechanical-chemical synergy in photochemical mechanical polishing monocrystalline yttrium aluminum garnet: An integrated machine learning, response surface, and mathematical methodology
Release Time:2026-03-29 Hits:
Indexed by: Journal Papers
Document Code: 591714
Date of Publication: 2026-03-26
Journal: ADVANCED ENGINEERING INFORMATICS
Volume: 70
ISSN: 1474-0346
Key Words: CRYSTAL; FEEDFORWARD NETWORKS