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Synergistic Oxidational Effect of Hydroxyl and Sulfate Radicals Induced an Efficient Removal Mechanism in Photochemical Mechanical Polishing of Yttrium Aluminum Garnet

Release Time:2026-03-29  Hits:

Indexed by: Journal Papers

Document Code: 478251

Date of Publication: 2025-02-03

Journal: ACS APPLIED NANO MATERIALS

Key Words: ESCA; OXIDE; RAY PHOTOELECTRON-SPECTROSCOPY

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