Release Time:2026-03-29 Hits:
Indexed by: Journal Papers
Document Code: 478280
Date of Publication: 2025-08-13
Journal: PRECISION ENGINEERING-JOURNAL OF THE INTERNATIONAL SOCIETIES FOR PRECISION ENGINEERING AND NANOTECHNOLOGY
Volume: 95
Page Number: 238-250
ISSN: 0141-6359
Key Words: COMPENSATION; FABRICATION; OPTICS
Prev One:Synergistic Oxidational Effect of Hydroxyl and Sulfate Radicals Induced an Efficient Removal Mechanism in Photochemical Mechanical Polishing of Yttrium Aluminum Garnet
Next One:Predictive models for the surface roughness and subsurface damage depth of semiconductor materials in precision grinding