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一种消除重力影响的薄基片变形测量方法

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First Author:Dong Zhigang

Disigner of the Invention:Renke Kang,刘海军,Shang GAO,zhuxianglong,Zhou Ping,陈修艺

Application Number:CN201510496479.7

Authorization Date:2015-08-13

Authorization number:CN105066897A

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