Current position: Home >> Scientific Research >> Patents

一种大型抛光机盘面平面度检测装置及其工作方法

Release Time:2021-01-05  Hits:

First Author: zhuxianglong

Disigner of the Invention: Renke Kang,Dong Zhigang,马进,Shang GAO,Harry,金洙吉

Authorization Number: 201811095740.2

Prev One:一种圆形低刚度工件的平行度及平面度测量装置及方法

Next One:一种消除重力影响的薄基片变形测量方法